PROJECT TITLE :

Highly piezoelectric MgZr co-doped aluminum nitride-based vibrational energy harvesters [Correspondence]

ABSTRACT:

The first MgZr co-doped AlN-primarily based vibrational energy harvester (VEH) is presented. (MgZr)AlN, that is a new category of doped AlN, provides high piezoelectricity and cost advantage. Using thirteenpercent-(MgZr)-doped AlN for micromachined VEHs, maximum output power of one.three μW was achieved with a Q-factor of 400 when resonant frequency, vibration acceleration, load resistance were 792 Hz, 8 m/s2, and one.one MΩ, respectively. Normalized power density was 8.one kW.g???two.m???three. This was one amongst the highest values among the currently accessible piezoelectric VEHs.